<< Chapter < Page Chapter >> Page >
Sequence of events during CVD: (a) diffusion of reactants through boundary layer, (b) adsorption of reactants on substrate, (c) chemical reaction takes place, (d) desorption of adsorbed species, and (e) diffusion out of by-products through boundary layer. Adapted from H. O. Pierson, Handbook of Chemical Vapor Deposition , Noyes Publications, Park Ridge (1992).

The boundary layer

Gas flow in a CVD reactor is generally laminar, although in some cases heating of the chamber walls will create convection currents. The complete problem of gas flow through the system is too complex to be described here; however, assuming we have laminar flow (often a safe assumption) the gas velocity at the chamber walls will be zero. Between the wall (zero velocity) and the bulk gas velocity there is a boundary layer. The boundary layer thickness increases with lowered gas velocity and the distance from the tube inlet ( [link] ). Reactant gases flowing in the bulk must diffuse through the boundary layer to reach the substrate surface. Often, the susceptor is tilted to partially compensate for the increasing boundary-layer thickness and concentration profile.

Development of boundary layer in a horizontal reactor. Adapted from G. B. Stringfellow, Organometallic Vapor-Phase Epitaxy: Theory and Practice , Academic Press, New York (1994).

Rate limiting steps

During CVD the growth rate of the film is limited by either surface reaction kinetics, mass transport (diffusion) of precursors to the substrate, or the feed rate of the precursors.

Surface reaction controls the rate when growth occurs at low temperatures (where the reaction occurs slowly) and also dominates at low pressures (where the boundary layer is thin and reactants easily diffuse to the surface), see [link] . Since reactants easily diffuse through the boundary layer, the amount of reactant at the surface is independent of reactor pressure. Therefore, it is the reactions and motions of the precursors adsorbed on the surface which will determine the overall growth rate of the film. A sign of surface reaction limited growth would be dependence of the growth rate on substrate orientation, since the orientation would certainly not affect the thermodynamics or mass transport of the system.

Surface reaction limited growth in CVD. Adapted from H. O. Pierson, Handbook of Chemical Vapor Deposition , Noyes Publications, Park Ridge (1992).

A deposition limited by mass transport is controlled by the diffusion of reactants through the boundary layer and diffusion of by-products out of the boundary layer. Mass transport limits reactions when the temperature and pressure are high. These conditions increases the thickness of the boundary layer and make it harder for gases to diffuse through ( [link] ). In addition, decomposition of the reactants is typically quicker since the substrate is at a higher temperature. When mass transport limits the growth, either increasing the gas velocity or rotating the substrate during growth will decrease the boundary layer and increase the growth rate.

Questions & Answers

how to know photocatalytic properties of tio2 nanoparticles...what to do now
Akash Reply
it is a goid question and i want to know the answer as well
Maciej
Do somebody tell me a best nano engineering book for beginners?
s. Reply
what is fullerene does it is used to make bukky balls
Devang Reply
are you nano engineer ?
s.
fullerene is a bucky ball aka Carbon 60 molecule. It was name by the architect Fuller. He design the geodesic dome. it resembles a soccer ball.
Tarell
what is the actual application of fullerenes nowadays?
Damian
That is a great question Damian. best way to answer that question is to Google it. there are hundreds of applications for buck minister fullerenes, from medical to aerospace. you can also find plenty of research papers that will give you great detail on the potential applications of fullerenes.
Tarell
what is the Synthesis, properties,and applications of carbon nano chemistry
Abhijith Reply
Mostly, they use nano carbon for electronics and for materials to be strengthened.
Virgil
is Bucky paper clear?
CYNTHIA
so some one know about replacing silicon atom with phosphorous in semiconductors device?
s. Reply
Yeah, it is a pain to say the least. You basically have to heat the substarte up to around 1000 degrees celcius then pass phosphene gas over top of it, which is explosive and toxic by the way, under very low pressure.
Harper
Do you know which machine is used to that process?
s.
how to fabricate graphene ink ?
SUYASH Reply
for screen printed electrodes ?
SUYASH
What is lattice structure?
s. Reply
of graphene you mean?
Ebrahim
or in general
Ebrahim
in general
s.
Graphene has a hexagonal structure
tahir
On having this app for quite a bit time, Haven't realised there's a chat room in it.
Cied
what is biological synthesis of nanoparticles
Sanket Reply
what's the easiest and fastest way to the synthesize AgNP?
Damian Reply
China
Cied
types of nano material
abeetha Reply
I start with an easy one. carbon nanotubes woven into a long filament like a string
Porter
many many of nanotubes
Porter
what is the k.e before it land
Yasmin
what is the function of carbon nanotubes?
Cesar
I'm interested in nanotube
Uday
what is nanomaterials​ and their applications of sensors.
Ramkumar Reply
what is nano technology
Sravani Reply
what is system testing?
AMJAD
preparation of nanomaterial
Victor Reply
Yes, Nanotechnology has a very fast field of applications and their is always something new to do with it...
Himanshu Reply
good afternoon madam
AMJAD
what is system testing
AMJAD
what is the application of nanotechnology?
Stotaw
In this morden time nanotechnology used in many field . 1-Electronics-manufacturad IC ,RAM,MRAM,solar panel etc 2-Helth and Medical-Nanomedicine,Drug Dilivery for cancer treatment etc 3- Atomobile -MEMS, Coating on car etc. and may other field for details you can check at Google
Azam
anybody can imagine what will be happen after 100 years from now in nano tech world
Prasenjit
after 100 year this will be not nanotechnology maybe this technology name will be change . maybe aftet 100 year . we work on electron lable practically about its properties and behaviour by the different instruments
Azam
name doesn't matter , whatever it will be change... I'm taking about effect on circumstances of the microscopic world
Prasenjit
how hard could it be to apply nanotechnology against viral infections such HIV or Ebola?
Damian
silver nanoparticles could handle the job?
Damian
not now but maybe in future only AgNP maybe any other nanomaterials
Azam
Hello
Uday
I'm interested in Nanotube
Uday
this technology will not going on for the long time , so I'm thinking about femtotechnology 10^-15
Prasenjit
can nanotechnology change the direction of the face of the world
Prasenjit Reply
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
Privacy Information Security Software Version 1.1a
Good
Got questions? Join the online conversation and get instant answers!
QuizOver.com Reply

Get the best Algebra and trigonometry course in your pocket!





Source:  OpenStax, Chemistry of electronic materials. OpenStax CNX. Aug 09, 2011 Download for free at http://cnx.org/content/col10719/1.9
Google Play and the Google Play logo are trademarks of Google Inc.

Notification Switch

Would you like to follow the 'Chemistry of electronic materials' conversation and receive update notifications?

Ask