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SSPD_Chapter 6_Part 7_Introduction to ATHENA 7 is the concluding part of this topic 'Introduction to ATHENA'. This module concludes this section with Epitaxy Simulation.

SSPD_Chapter 6_Part 7_Introduction to ATHENA 7_Process Simulator

7.7 Background of ATHENA.

7.7.9 Simulating the Epitaxy Process.

ATHENA/SSUPREM4 can simulate a high temperature silicon epitaxial processes. The epitaxy process is considered as a combination of deposit and diffuse processes. Therefore, processes such as autodoping from a highly doped buried layer into a lightly doped epitaxial layer can be simulated. Diffusion parameters for epitaxial silicon, however, are considered the same as for single crystal silicon.

The epitaxy process is defined in the ATHENA Epitaxy Menu (Figure 7-39). To open this menu, select Process→Epitaxy in the Commands menu. The ATHENA Epitaxy Menu consists of five sections:

• The Time/temperature section selects temperature step parameters in the same way as in the DIFFUSE statement.

• The Thickness/rate section selects either the total thickness of the epitaxial layer, or the deposit rate in microns/minute. In the latter case, the total thickness will be determined by the rate and time.

• The Grid Specification section specifies the vertical grid structure within the grown epitaxial layer. All grid parameters are equivalent to those of the ATHENA Deposit Menu

• The Ambient section is where the gas pressure can be modified to the value used in the Epitaxial Chamber.

• The Impurity Concentrations section specifies the growing epitaxial layer in the same way as in the DIFFUSE statement.

All parameters in the last three groups are optional. If the parameters of an epitaxial step are set exactly as shown in Figure 7.39, the following statement will appear in the input file:

# EPI-LAYER

EPITAXY TIME=30 TEMP=900 T.FINAL=1000 THICKNESS=5 DIVISIONS=20 \ DY=0.05 YDY=0.00

Note: The diffusion during the epitaxy process will use the Diffusion Model Set in the most recent METHOD statement. If you need another METHOD statement, include it before the EPITAXY statement.

Figure 7.39. ATHENA Epitaxy Menu

Questions & Answers

what does nano mean?
Anassong Reply
nano basically means 10^(-9). nanometer is a unit to measure length.
Bharti
do you think it's worthwhile in the long term to study the effects and possibilities of nanotechnology on viral treatment?
Damian Reply
absolutely yes
Daniel
how to know photocatalytic properties of tio2 nanoparticles...what to do now
Akash Reply
it is a goid question and i want to know the answer as well
Maciej
characteristics of micro business
Abigail
for teaching engĺish at school how nano technology help us
Anassong
Do somebody tell me a best nano engineering book for beginners?
s. Reply
what is fullerene does it is used to make bukky balls
Devang Reply
are you nano engineer ?
s.
fullerene is a bucky ball aka Carbon 60 molecule. It was name by the architect Fuller. He design the geodesic dome. it resembles a soccer ball.
Tarell
what is the actual application of fullerenes nowadays?
Damian
That is a great question Damian. best way to answer that question is to Google it. there are hundreds of applications for buck minister fullerenes, from medical to aerospace. you can also find plenty of research papers that will give you great detail on the potential applications of fullerenes.
Tarell
what is the Synthesis, properties,and applications of carbon nano chemistry
Abhijith Reply
Mostly, they use nano carbon for electronics and for materials to be strengthened.
Virgil
is Bucky paper clear?
CYNTHIA
so some one know about replacing silicon atom with phosphorous in semiconductors device?
s. Reply
Yeah, it is a pain to say the least. You basically have to heat the substarte up to around 1000 degrees celcius then pass phosphene gas over top of it, which is explosive and toxic by the way, under very low pressure.
Harper
Do you know which machine is used to that process?
s.
how to fabricate graphene ink ?
SUYASH Reply
for screen printed electrodes ?
SUYASH
What is lattice structure?
s. Reply
of graphene you mean?
Ebrahim
or in general
Ebrahim
in general
s.
Graphene has a hexagonal structure
tahir
On having this app for quite a bit time, Haven't realised there's a chat room in it.
Cied
what is biological synthesis of nanoparticles
Sanket Reply
what's the easiest and fastest way to the synthesize AgNP?
Damian Reply
China
Cied
types of nano material
abeetha Reply
I start with an easy one. carbon nanotubes woven into a long filament like a string
Porter
many many of nanotubes
Porter
what is the k.e before it land
Yasmin
what is the function of carbon nanotubes?
Cesar
I'm interested in nanotube
Uday
what is nanomaterials​ and their applications of sensors.
Ramkumar Reply
what is nano technology
Sravani Reply
what is system testing?
AMJAD
preparation of nanomaterial
Victor Reply
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Source:  OpenStax, Solid state physics and devices-the harbinger of third wave of civilization. OpenStax CNX. Sep 15, 2014 Download for free at http://legacy.cnx.org/content/col11170/1.89
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