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Because MBE takes place in UHV and has relatively low pressure of residual gas at the surface, analysis techniques such as reflection high energy diffraction and ellipsometry can be used during growth, both to study and control the growth process. The UHV environment also allows pre or post growth analysis techniques such as Auger spectroscopy.

Elemental and molecular sources

The effusion cell is used for the majority of MBE growth. All materials used in the cell are carefully chosen to be noninteracting with the element being evaporated. For example, the crucible is pyrolitic boron nitride. However, it has disadvantages, such as:

  • The evaporated species may be molecular, rather than monomeric, which will require further dissocation at the surface.
  • When the shutter is opened, the heat loss from the cell results in a transient in the beam flux which last for several minutes and cause variations of up to 50%.
  • The growth chamber must be opened up to replace the solid sources.

Cracker cells are used to improve the ratio of monomeric to molecular (or at least dimeric to tetrameric) particles from the source. The cracker cell, placed so that the beam passes through it after the effusion cell, is maintained at a high temperature (and sometimes high pressure) to encourage dissociation. The dissociation process generally requires a catalyst and the best catalysts for a given species have been studied.

Some elements, such as silicon, have low enough vapor pressure that more direct heating techniques such as electron bombardment or laser radiation heating are used. The electron beam is bent using electromagnetic focusing to prevent any impurities in the electron source from contaminating the silicon to be used in MBE. Because the heat is concentrated on the surface to be evaporated, interactions with and contamination from the crucible walls is reduced. In addition, this design does not require a shutter, so there is no problem with transients. Modulation of the beam can produce very sharp interfaces on the substrate. In laser radiation heating, the electron beam is replaced by a laser beam. The advantages of localized heating and rapid modulation are also maintained without having to worry about contamination from the electron source or stray electrons.

Some of the II-VI (12-16) compounds have such high vapor pressure that a Knudson cell cannot be used. For example, the mercury source must be kept cooler than the substrate to keep the vapor pressure low enough to be feasible. The Hg source must also be sealed off from the growth chamber to allow the chamber to be pumped down.

Two other methods of obtaining the elements for use in epitaxy are gas-source epitaxy and chemical beam epitaxy (CBE). Both of these methods use gas sources, but they are distinguished by the use of elemental beams in gas source epitaxy, while organometallic beams are used in CBE. For the example of III-V (13-15) semiconductors, in gas epitaxy, the group III material may come from an effusion cell while the group V material is the hydride, such as AsH 3 or PH 3 , which is cracked before entering the growth chamber. In CBE, the group V material is an organometallic, such as triethylgallium [Ga(C 2 H 5 ) 3 ] or trimethylaluminum [Al(CH 3 ) 3 ], which adsorbs on the surface, where it dissociates.

Questions & Answers

how to know photocatalytic properties of tio2 nanoparticles...what to do now
Akash Reply
it is a goid question and i want to know the answer as well
Do somebody tell me a best nano engineering book for beginners?
s. Reply
what is fullerene does it is used to make bukky balls
Devang Reply
are you nano engineer ?
fullerene is a bucky ball aka Carbon 60 molecule. It was name by the architect Fuller. He design the geodesic dome. it resembles a soccer ball.
what is the actual application of fullerenes nowadays?
That is a great question Damian. best way to answer that question is to Google it. there are hundreds of applications for buck minister fullerenes, from medical to aerospace. you can also find plenty of research papers that will give you great detail on the potential applications of fullerenes.
what is the Synthesis, properties,and applications of carbon nano chemistry
Abhijith Reply
Mostly, they use nano carbon for electronics and for materials to be strengthened.
is Bucky paper clear?
so some one know about replacing silicon atom with phosphorous in semiconductors device?
s. Reply
Yeah, it is a pain to say the least. You basically have to heat the substarte up to around 1000 degrees celcius then pass phosphene gas over top of it, which is explosive and toxic by the way, under very low pressure.
Do you know which machine is used to that process?
how to fabricate graphene ink ?
for screen printed electrodes ?
What is lattice structure?
s. Reply
of graphene you mean?
or in general
in general
Graphene has a hexagonal structure
On having this app for quite a bit time, Haven't realised there's a chat room in it.
what is biological synthesis of nanoparticles
Sanket Reply
what's the easiest and fastest way to the synthesize AgNP?
Damian Reply
types of nano material
abeetha Reply
I start with an easy one. carbon nanotubes woven into a long filament like a string
many many of nanotubes
what is the k.e before it land
what is the function of carbon nanotubes?
I'm interested in nanotube
what is nanomaterials​ and their applications of sensors.
Ramkumar Reply
what is nano technology
Sravani Reply
what is system testing?
preparation of nanomaterial
Victor Reply
Yes, Nanotechnology has a very fast field of applications and their is always something new to do with it...
Himanshu Reply
good afternoon madam
what is system testing
what is the application of nanotechnology?
In this morden time nanotechnology used in many field . 1-Electronics-manufacturad IC ,RAM,MRAM,solar panel etc 2-Helth and Medical-Nanomedicine,Drug Dilivery for cancer treatment etc 3- Atomobile -MEMS, Coating on car etc. and may other field for details you can check at Google
anybody can imagine what will be happen after 100 years from now in nano tech world
after 100 year this will be not nanotechnology maybe this technology name will be change . maybe aftet 100 year . we work on electron lable practically about its properties and behaviour by the different instruments
name doesn't matter , whatever it will be change... I'm taking about effect on circumstances of the microscopic world
how hard could it be to apply nanotechnology against viral infections such HIV or Ebola?
silver nanoparticles could handle the job?
not now but maybe in future only AgNP maybe any other nanomaterials
I'm interested in Nanotube
this technology will not going on for the long time , so I'm thinking about femtotechnology 10^-15
can nanotechnology change the direction of the face of the world
Prasenjit Reply
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
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Source:  OpenStax, Chemistry of electronic materials. OpenStax CNX. Aug 09, 2011 Download for free at http://cnx.org/content/col10719/1.9
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