<< Chapter < Page Chapter >> Page >


One of the main research interests of the semiconductor industry is to improve the performance of semiconducting devices and to construct new materials with reduced size or thickness that have potential application in transistors and microelectronic devices. However, the most significant challenge regarding thin film semiconductor materials is measurement. Properties such as the thickness, composition at the surface, and contamination, all are critical parameters of the thin films. To address these issues, we need an analytical technique which can measure accurately through the depth of the of the semiconductor surface without destruction of the material. Rutherford backscattering spectroscopy is a unique analysis method for this purpose. It can give us information regarding in-depth profiling in a non-destructive manner. However X-ray photo electron spectroscopy (XPS), energy dispersive X-ray analysis (EDX) and Auger electron spectroscopy are also able to study the depth-profile of semiconductor films. [link] demonstrates the comparison between those techniques with RBS.

Comparison between different thin film analysis techniques.
Method Destructive Incident particle Outgoing Particle Detection limit Depth resolution
RBS No Ion Ion ~1 10 nm
XPS Yes X-ray photon Electron ~0.1-1 ~1 µm
EDX Yes Electron X-ray photon ~0.1 1.5 nm
Auger Yes Electron Electron ~0.1-1 1.5 nm

Basic concept of rutherford backscattering spectroscopy

At a basic level, RBS demonstrates the electrostatic repulsion between high energy incident ions and target nuclei. The specimen under study is bombarded with monoenergetic beam of 4 He + particles and the backscattered particles are detected by the detector-analysis system which measures the energies of the particles. During the collision, energy is transferred from the incident particle to the target specimen atoms; the change in energy of the scattered particle depends on the masses of incoming and target atoms. For an incident particle of mass M 1 , the energy is E 0 while the mass of the target atom is M 2 . After the collision, the residual energy E of the particle scattered at angle Ø can be expressed as:

where k is the kinematic scattering factor, which is actually the energy ratio of the particle before and after the collision. Since k depends on the masses of the incident particle and target atom and the scattering angle, the energy of the scattered particle is also determined by these three parameters. A simplified layout of backscattering experiment is shown in Figure 1 .

alternate text
Schematic representation of the experimental setup for Rutherford backscattering analysis.

The probability of a scattering event can be described by the differential scattering cross section of a target atom for scattering an incoming particle through the angle Ø into differential solid angle as follows,

where d σ R is the effective differential cross section for the scattering of a particle. The above equation may looks complicated but it conveys the message that the probability of scattering event can be expressed as a function of scattering cross section which is proportional to the zZ when a particle with charge ze approaches the target atom with charge Ze.

Questions & Answers

so some one know about replacing silicon atom with phosphorous in semiconductors device?
s. Reply
how to fabricate graphene ink ?
for screen printed electrodes ?
What is lattice structure?
s. Reply
of graphene you mean?
or in general
in general
Graphene has a hexagonal structure
On having this app for quite a bit time, Haven't realised there's a chat room in it.
what is biological synthesis of nanoparticles
Sanket Reply
what's the easiest and fastest way to the synthesize AgNP?
Damian Reply
types of nano material
abeetha Reply
I start with an easy one. carbon nanotubes woven into a long filament like a string
many many of nanotubes
what is the k.e before it land
what is the function of carbon nanotubes?
I'm interested in nanotube
what is nanomaterials​ and their applications of sensors.
Ramkumar Reply
what is nano technology
Sravani Reply
what is system testing?
preparation of nanomaterial
Victor Reply
Yes, Nanotechnology has a very fast field of applications and their is always something new to do with it...
Himanshu Reply
good afternoon madam
what is system testing
what is the application of nanotechnology?
In this morden time nanotechnology used in many field . 1-Electronics-manufacturad IC ,RAM,MRAM,solar panel etc 2-Helth and Medical-Nanomedicine,Drug Dilivery for cancer treatment etc 3- Atomobile -MEMS, Coating on car etc. and may other field for details you can check at Google
anybody can imagine what will be happen after 100 years from now in nano tech world
after 100 year this will be not nanotechnology maybe this technology name will be change . maybe aftet 100 year . we work on electron lable practically about its properties and behaviour by the different instruments
name doesn't matter , whatever it will be change... I'm taking about effect on circumstances of the microscopic world
how hard could it be to apply nanotechnology against viral infections such HIV or Ebola?
silver nanoparticles could handle the job?
not now but maybe in future only AgNP maybe any other nanomaterials
I'm interested in Nanotube
this technology will not going on for the long time , so I'm thinking about femtotechnology 10^-15
can nanotechnology change the direction of the face of the world
Prasenjit Reply
At high concentrations (>0.01 M), the relation between absorptivity coefficient and absorbance is no longer linear. This is due to the electrostatic interactions between the quantum dots in close proximity. If the concentration of the solution is high, another effect that is seen is the scattering of light from the large number of quantum dots. This assumption only works at low concentrations of the analyte. Presence of stray light.
Ali Reply
the Beer law works very well for dilute solutions but fails for very high concentrations. why?
bamidele Reply
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
Privacy Information Security Software Version 1.1a
advantages of NAA
Sai Reply
how I can reaction of mercury?
Sham Reply

Get the best Physical methods in ch... course in your pocket!

Source:  OpenStax, Physical methods in chemistry and nano science. OpenStax CNX. May 05, 2015 Download for free at http://legacy.cnx.org/content/col10699/1.21
Google Play and the Google Play logo are trademarks of Google Inc.

Notification Switch

Would you like to follow the 'Physical methods in chemistry and nano science' conversation and receive update notifications?