<< Chapter < Page Chapter >> Page >

Two important points have now been established:

1. For sound device physics reasons, most RTA processes consist of high temperature, short duration anneals.

2. Damage-enhanced diffusion will only occur for a few seconds at typical RTA temperatures.

For accurate simulation of RTA, the second point is most important and often wrongly neglected. Suppose an RTA consists of a 10 second ramp up to 1000°C, followed by a 20 second anneal and a 10 second cool down. From the second point, it is apparent that most of the Total Dopant Diffusion would have taken place during the Ramp Up Phase of the RTA.

Therefore, always model the temperature ramp up accurately when simulating an RTA process. In most cases, the ramp down can be neglected, since all the diffusion has already taken place at the beginning when the silicon was still damaged.

7.7.9: Simulating Oxidation

It has already been stated that the pull down menu for simulating oxidations is the same as that for simulating inert diffusions described in the “Simulating Diffusion” Section on page 2-37. See this section for advice on selecting the appropriate pull down menu from DECKBUILD.

The default method for oxidation is Compress. In SSUPREM4 examples there are a number of examples which illustrate the use of different models for different processes and structures.

In our previous example described in the “Simulating Diffusion” Section on page 2-37, if the next temperature step is going to be at a constant temperature of 1000°C in dry O2 with 3% of HCL in the ambient, select the Dry O2 box and set HCL% equal to 3 in the Ambient section of the Diffuse menu. The following input file fragment will appear:



If the ambient is a mixture consisting of more than one oxidant, the total oxidation rate will depend on the combined effect of all species in the ambient. To specify the contents of the ambient mixture, select the Gas Flow button in the Ambient section and an additional ATHENA Gas Flow Properties Menu (Figure 7-38) will appear.

Figure 7.38. ATHENA Gas Flow Properties

If the Gas Flow components are selected, as shown in Figure 7.38, the following statement will be generated:


DIFFUSE TIME=60 TEMP=1000 F.H2O=5.3 F.HCL=0.06 F.O2=8.0 \ PRESS=1.00

One or several impurities can be present in the ambient. To set ambient in the Impurity Concentration section of the ATHENA Diffuse Menu (See Figure 7-37), check the corresponding checkboxes, and set the values using sliders and the Exp menus.

For example, by selecting the appropriate boxes and values, the following DIFFUSE statement will be inserted into the input file:



Several other parameters not included on the menu are available in the DIFFUSE statement (Chapter 6: “Statements”, Section 6.15:“DIFFUSE”). The DUMP, DUMP.PREFIX, and NO.DIFF parameters can be useful. DUMP and DUMP.PREFIX can be used to make a movie using TONYPLOT. The NO.DIFF parameter specifies that impurity redistribution will be neglected. This provides a good approximation for low temperature processes, such as silicidation.

Several other model specification statements are important for diffusion processes. These are as follows:

• IMPURITY, INTERSTITIAL, and other impurity and point defect statements, which specify model parameters (e.g., diffusivity or segregation) of these species.

• The OXIDE statement, which specifies parameters for different oxidation models.

• The MATERIAL statement, which specifies some basic parameters for all materials.

• The SILICIDE statement, which specifies silicidation coefficients.

Table 7.7 shows the basic diffusion and oxidation models.

Table 7.7. Basic Diffusion and Oxidation Models.

Process Model Assumption Recommendation
Diffuse Fermi- Default Defect in equilibrium For undamaged substrates in inert ambients
two.dim Transient defect diffusion during oxidation, and after medium dose implant (e.g., OED)
full.cpl Defect and impurity binding energy model Post high dose implant&co-diffusion effects, but execution time is high
Oxidation Vertical Planar 1D oxidation only (should never be used)
Compress- Default Non-planar with linear flow 2D oxidation (e.g. birds beak)
ViscousElastic Non-planar with non- linear flow 2D oxidation (e.g. birds beak with thick Si3N4, however, execution time is higher

For a detailed description of all diffusion and oxidation models, see Chapter 3: “SSUPREM4 Models”, Sections 3.1: “Diffusion Models” and 3.3: “Oxidation Models”.

Questions & Answers

find the 15th term of the geometric sequince whose first is 18 and last term of 387
Jerwin Reply
I know this work
The given of f(x=x-2. then what is the value of this f(3) 5f(x+1)
virgelyn Reply
hmm well what is the answer
how do they get the third part x = (32)5/4
kinnecy Reply
can someone help me with some logarithmic and exponential equations.
Jeffrey Reply
sure. what is your question?
okay, so you have 6 raised to the power of 2. what is that part of your answer
I don't understand what the A with approx sign and the boxed x mean
it think it's written 20/(X-6)^2 so it's 20 divided by X-6 squared
I'm not sure why it wrote it the other way
I got X =-6
ok. so take the square root of both sides, now you have plus or minus the square root of 20= x-6
oops. ignore that.
so you not have an equal sign anywhere in the original equation?
is it a question of log
I rally confuse this number And equations too I need exactly help
But this is not salma it's Faiza live in lousvile Ky I garbage this so I am going collage with JCTC that the of the collage thank you my friends
Commplementary angles
Idrissa Reply
im all ears I need to learn
right! what he said ⤴⤴⤴
what is a good calculator for all algebra; would a Casio fx 260 work with all algebra equations? please name the cheapest, thanks.
Kevin Reply
a perfect square v²+2v+_
Dearan Reply
kkk nice
Abdirahman Reply
algebra 2 Inequalities:If equation 2 = 0 it is an open set?
Kim Reply
or infinite solutions?
The answer is neither. The function, 2 = 0 cannot exist. Hence, the function is undefined.
Embra Reply
if |A| not equal to 0 and order of A is n prove that adj (adj A = |A|
Nancy Reply
rolling four fair dice and getting an even number an all four dice
ramon Reply
Kristine 2*2*2=8
Bridget Reply
Differences Between Laspeyres and Paasche Indices
Emedobi Reply
No. 7x -4y is simplified from 4x + (3y + 3x) -7y
Mary Reply
how do you translate this in Algebraic Expressions
linda Reply
Need to simplify the expresin. 3/7 (x+y)-1/7 (x-1)=
Crystal Reply
. After 3 months on a diet, Lisa had lost 12% of her original weight. She lost 21 pounds. What was Lisa's original weight?
Chris Reply
what's the easiest and fastest way to the synthesize AgNP?
Damian Reply
types of nano material
abeetha Reply
I start with an easy one. carbon nanotubes woven into a long filament like a string
many many of nanotubes
what is the k.e before it land
what is the function of carbon nanotubes?
I'm interested in nanotube
what is nanomaterials​ and their applications of sensors.
Ramkumar Reply
what is nano technology
Sravani Reply
what is system testing?
preparation of nanomaterial
Victor Reply
Yes, Nanotechnology has a very fast field of applications and their is always something new to do with it...
Himanshu Reply
good afternoon madam
what is system testing
what is the application of nanotechnology?
In this morden time nanotechnology used in many field . 1-Electronics-manufacturad IC ,RAM,MRAM,solar panel etc 2-Helth and Medical-Nanomedicine,Drug Dilivery for cancer treatment etc 3- Atomobile -MEMS, Coating on car etc. and may other field for details you can check at Google
anybody can imagine what will be happen after 100 years from now in nano tech world
after 100 year this will be not nanotechnology maybe this technology name will be change . maybe aftet 100 year . we work on electron lable practically about its properties and behaviour by the different instruments
name doesn't matter , whatever it will be change... I'm taking about effect on circumstances of the microscopic world
how hard could it be to apply nanotechnology against viral infections such HIV or Ebola?
silver nanoparticles could handle the job?
not now but maybe in future only AgNP maybe any other nanomaterials
I'm interested in Nanotube
this technology will not going on for the long time , so I'm thinking about femtotechnology 10^-15
can nanotechnology change the direction of the face of the world
Prasenjit Reply
At high concentrations (>0.01 M), the relation between absorptivity coefficient and absorbance is no longer linear. This is due to the electrostatic interactions between the quantum dots in close proximity. If the concentration of the solution is high, another effect that is seen is the scattering of light from the large number of quantum dots. This assumption only works at low concentrations of the analyte. Presence of stray light.
Ali Reply
the Beer law works very well for dilute solutions but fails for very high concentrations. why?
bamidele Reply
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
Privacy Information Security Software Version 1.1a
Got questions? Join the online conversation and get instant answers!
QuizOver.com Reply

Get the best Algebra and trigonometry course in your pocket!

Source:  OpenStax, Solid state physics and devices-the harbinger of third wave of civilization. OpenStax CNX. Sep 15, 2014 Download for free at http://legacy.cnx.org/content/col11170/1.89
Google Play and the Google Play logo are trademarks of Google Inc.

Notification Switch

Would you like to follow the 'Solid state physics and devices-the harbinger of third wave of civilization' conversation and receive update notifications?