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Figure 7.34. Effect on Boron diffusion profile when too small a substrate depth is used in the simulation

Figure 7.34. shows the Boron profiles for two identical anneals, the only difference is the depth of the simulated substrate. You’ll see that a shallow modeled substrate ( the upper curve with circles ) always results in more total diffusion, even though the substrate depth was greater than the total diffusion depth in both cases.

Modeling a deep substrate doesn’t need to involve a huge number of extra mesh points, since the mesh points can be placed quite far apart near the bottom of the substrate. All that is required of the mesh points near the bottom of the substrate is that there be sufficient to model the gradient of interstitials in this region. The number of additional mesh points can be further reduced in the X-direction by the using several RELAX statements.

For normal small geometry MOSFET/Bipolar processing, a substrate depth of 20 µm should be more than adequate. This depth can be reduced by plotting the vertical interstitial profiles at various points in the process to find the maximum depth of interstitial diffusion. There is little to be gained by reducing the depth of simulation, however, if the combination of large grid spacing is deep in the substrate and the RELAX statement is used appropriately.

7.7.5. Simulating Ion Implantation

Ion implantation is the main method used to introduce doping impurities into semiconductor device structures. Adequate simulation of the ion implantation process is very important because modern technologies employ small critical dimensions (CDs) and shallow doping profiles, high doses, tilted implants and other advanced methods.

The IMPLANT statement can be set by using the ATHENA Implant Menu (Figure 7.35). To open this menu, select Process →Implant... in the Commands menu.

Figure 7.35. ATHENA Implant Menu.

The following gives the minimum set of parameters that should be specified:

• Name of implant impurity (e.g., boron)

• Implant dose using the slider for the pre-exponential value (e.g., 4.0) and the Exp menu for the exponent (e.g., 12)

• Implant energy in KeV (e.g., 60)

• Tilt angle in degrees (e.g., 7°)

• Rotation angle in degrees (e.g., 30°)

All other parameters can use their default values.

Press the Write button and the following statement will appear in the input file.

# CHANNEL IMPLANT

# DUAL PEARSON MODEL IS BEING USED FOR IMPLANT PROFILE

IMPLANT BORON DOSE= 4.0E12 ENERGY= 60 PEARSON TILT=7 ROTATION=30 \ CRYSTAL

All of the parameters in the statement above are self-explanatory except CRYSTALLINE. The CRYSTALLINE parameter indicates that for all analytical models, the range statistics extracted for a single silicon crystal will be applied (when available). If AMORPHOUS is selected, the range parameters measured in pre-amorphized silicon will be used (when available). The CRYSTALLINE parameter also has another meaning for the Monte Carlo or BCA implant models. It invokes the Crystalline Material Model which takes channeling into account. Note that the latter model is much slower (5 - 10 times) than the Amorphous Material Model. The Crystalline Material Model is the default model for BCA or Monte Carlo simulation.

Questions & Answers

find the 15th term of the geometric sequince whose first is 18 and last term of 387
Jerwin Reply
The given of f(x=x-2. then what is the value of this f(3) 5f(x+1)
virgelyn Reply
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Abhi
how do they get the third part x = (32)5/4
kinnecy Reply
can someone help me with some logarithmic and exponential equations.
Jeffrey Reply
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ninjadapaul
20/(×-6^2)
Salomon
okay, so you have 6 raised to the power of 2. what is that part of your answer
ninjadapaul
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ninjadapaul
it think it's written 20/(X-6)^2 so it's 20 divided by X-6 squared
Salomon
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Salomon
I got X =-6
Salomon
ok. so take the square root of both sides, now you have plus or minus the square root of 20= x-6
ninjadapaul
oops. ignore that.
ninjadapaul
so you not have an equal sign anywhere in the original equation?
ninjadapaul
hmm
Abhi
is it a question of log
Abhi
🤔.
Abhi
Commplementary angles
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Uday
what is a good calculator for all algebra; would a Casio fx 260 work with all algebra equations? please name the cheapest, thanks.
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a perfect square v²+2v+_
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algebra 2 Inequalities:If equation 2 = 0 it is an open set?
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or infinite solutions?
Kim
The answer is neither. The function, 2 = 0 cannot exist. Hence, the function is undefined.
Al
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Kristine 2*2*2=8
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Differences Between Laspeyres and Paasche Indices
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No. 7x -4y is simplified from 4x + (3y + 3x) -7y
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Need to simplify the expresin. 3/7 (x+y)-1/7 (x-1)=
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. After 3 months on a diet, Lisa had lost 12% of her original weight. She lost 21 pounds. What was Lisa's original weight?
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China
Cied
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I start with an easy one. carbon nanotubes woven into a long filament like a string
Porter
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Porter
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what is system testing?
AMJAD
preparation of nanomaterial
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Yes, Nanotechnology has a very fast field of applications and their is always something new to do with it...
Himanshu Reply
good afternoon madam
AMJAD
what is system testing
AMJAD
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Stotaw
In this morden time nanotechnology used in many field . 1-Electronics-manufacturad IC ,RAM,MRAM,solar panel etc 2-Helth and Medical-Nanomedicine,Drug Dilivery for cancer treatment etc 3- Atomobile -MEMS, Coating on car etc. and may other field for details you can check at Google
Azam
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Prasenjit
after 100 year this will be not nanotechnology maybe this technology name will be change . maybe aftet 100 year . we work on electron lable practically about its properties and behaviour by the different instruments
Azam
name doesn't matter , whatever it will be change... I'm taking about effect on circumstances of the microscopic world
Prasenjit
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Damian
silver nanoparticles could handle the job?
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Azam
Hello
Uday
I'm interested in Nanotube
Uday
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Prasenjit
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Prasenjit Reply
At high concentrations (>0.01 M), the relation between absorptivity coefficient and absorbance is no longer linear. This is due to the electrostatic interactions between the quantum dots in close proximity. If the concentration of the solution is high, another effect that is seen is the scattering of light from the large number of quantum dots. This assumption only works at low concentrations of the analyte. Presence of stray light.
Ali Reply
the Beer law works very well for dilute solutions but fails for very high concentrations. why?
bamidele Reply
how did you get the value of 2000N.What calculations are needed to arrive at it
Smarajit Reply
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Source:  OpenStax, Solid state physics and devices-the harbinger of third wave of civilization. OpenStax CNX. Sep 15, 2014 Download for free at http://legacy.cnx.org/content/col11170/1.89
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